Pfeiffer Vacuum turbopump for ion implantation
Pfeiffer Vacuum’s new HiPace 2800 IT turbopump is designed for ion implantation applications and has a rotor design which results in high pumping speeds for light gases.
This ensures good process adaption for ion implantation processes, where hydrogen is the most accumulating gas. The HiPace 2800 IT has a 2,600 l/s pumping speed for hydrogen which, the company says, makes it the best turbopump in its class.
The intelligent temperature management system prevents process condensation and deposition inside the pumping system. It allows individual setting of the temperature to best support the specific process.
The special coating of the rotor ensures robustness against all ion implantation process materials. The HiPace turbopumps have a very resilient bearing design, based on a so-called hybrid bearing, which is a combination of ceramic ball bearings on the fore-vacuum side and permanently magnetic radial bearings on the high vacuum side.